The Determination of Ions in Wipers by Ion Chromatography (IC)

Test Method 18Test Method 18

The Determination of Ions in Wipers by Ion Chromatography (IC)

A rapid analytical technique for qualitative and quantitative determination of a wide variety of ionic species.

"The microelectronic and data storage industries are adversely affected by ionic contamination, e.g. inadvertent doping of silicon wafers and corrosion of metallization lines and disk drive components. This test method describes the ion chromatographic measurement of ionic constituents present in cleanroom wipers.

The Group IA and IIA cations of potassium, sodium, calcium and magnesium and common anions such as chloride, fluoride, nitrate, sulfate and phosphate can be determined to parts per billion levels with this method..."